{"id":235,"date":"2020-09-10T15:52:12","date_gmt":"2020-09-10T06:52:12","guid":{"rendered":"https:\/\/pplab.eec.iwate-u.ac.jp\/?p=235"},"modified":"2020-09-10T16:37:57","modified_gmt":"2020-09-10T07:37:57","slug":"hipims","status":"publish","type":"post","link":"https:\/\/pplab.eec.iwate-u.ac.jp\/index.php\/2020\/09\/10\/hipims\/","title":{"rendered":"\u5927\u96fb\u529b\u30a4\u30f3\u30d1\u30eb\u30b9\u30de\u30b0\u30cd\u30c8\u30ed\u30f3\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0\u306e\u7279\u6027\u8a55\u4fa1\u3068\u6210\u819c\u3078\u306e\u5fdc\u7528"},"content":{"rendered":"\n<div class=\"wp-block-columns\">\n<div class=\"wp-block-column\" style=\"flex-basis:66.66%\">\n<p>\u3000HiPIMS(High Power Impulse Magnetron Sputtering)\u306f\uff0c\u30d1\u30eb\u30b9\u30d1\u30ef\u30fc\u306b\u3088\u308a\u751f\u6210\u3057\u305f\u9ad8\u5bc6\u5ea6\u30d7\u30e9\u30ba\u30de\u3092\u7528\u3044\u3066\uff0c\u7269\u8cea\u8868\u9762\u306b\u539a\u3055\u6570\u00b5m\u7a0b\u5ea6\u306e\u8584\u819c\u3092\u5f62\u6210\u3059\u308b\u6210\u819c\u6280\u8853\u306e\u4e00\u7a2e\u3067\u3059\u3002<\/p>\n\n\n\n<p>\u3000\u7269\u8cea\u8868\u9762\u306b\u8584\u819c\u3092\u5f62\u6210\u3059\u308b\u6210\u819c\u6280\u8853\u306f\uff0c\u534a\u5c0e\u4f53\u30fb\u81ea\u52d5\u8eca\u90e8\u54c1\u30fb\u5207\u524a\u5de5\u5177\u30fb\u91d1\u578b\u30fb\u533b\u7642\u6a5f\u5668\u306a\u3069\uff0c\u5de5\u696d\u7684\u306b\u69d8\u3005\u306a\u5206\u91ce\u3067\u5229\u7528\u3055\u308c\u3066\u3044\u307e\u3059\u3002\u8584\u819c\u3092\u5806\u7a4d\u3055\u305b\u308b\u3053\u3068\u3067\u5fae\u7d30\u69cb\u9020\u306e\u4f5c\u6210\uff0c\u65e2\u5b58\u306e\u6750\u6599\u306e\u5f37\u5316\u304c\u53ef\u80fd\u3068\u306a\u308a\u307e\u3059\u3002\u8584\u819c\u3092\u6210\u819c\u3059\u308b\u6280\u8853\u306e\u4e00\u3064\u3068\u3057\u3066\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0\u6cd5\u304c\u77e5\u3089\u308c\u3066\u3044\u307e\u3059\u3002\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0\u6cd5\u306f\uff0c\u6750\u6599\u9078\u629e\u306e\u5e45\u306e\u5e83\u3055\uff0c\u9ad8\u3044\u5bc6\u7740\u6027\u304c\u7279\u5fb4\u3068\u306a\u308a\u307e\u3059\u3002\u3057\u304b\u3057\uff0c\u5f93\u6765\u306e\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0\u6cd5\u306f\uff0c\u819c\u8cea\u306e\u5236\u5fa1\u304c\u56f0\u96e3\u3067\u3042\u308b\uff0c\u6210\u819c\u901f\u5ea6\u304c\u9045\u3044\u3068\u3044\u3046\u6b20\u70b9\u304c\u3042\u308a\u307e\u3059\u3002<\/p>\n\n\n\n<p>\u3000HiPIMS\u306f\uff0c\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0\u6cd5\u306e\u4e00\u7a2e\u3067\u3042\u308a\uff0c\u78c1\u5834\u3068\u30d1\u30eb\u30b9\u30d1\u30ef\u30fc\u3092\u7528\u3044\u308b\u3053\u3068\u3067\uff0c\u5f93\u6765\u306e\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0\u6cd5\u306b\u6bd4\u3079\u3066\uff0c\u30a4\u30aa\u30f3\u5316\u7387\u304c\u5411\u4e0a\u3057\uff0c\u819c\u8cea\u306e\u5236\u5fa1\u304c\u6bd4\u8f03\u7684\u5bb9\u6613\u3068\u306a\u308a\u307e\u3059\u3002\u4e00\u65b9\u3067\uff0c\u6210\u819c\u901f\u5ea6\u304c\u9045\u3044\u3053\u3068\u3084\uff0c\u88c5\u7f6e\u304c\u5927\u578b\u3067\u3042\u308b\u3068\u3044\u3063\u305f\u6b20\u70b9\u304c\u3042\u308a\u307e\u3059\u3002\u79c1\u305f\u3061\u306f\uff0c\u3053\u308c\u3089\u306e\u6b20\u70b9\u306e\u6539\u5584\u3068HiPIMS\u306e\u30a4\u30aa\u30f3\u5316\u7387\u306e\u5411\u4e0a\u3092\u76ee\u6307\u3057\uff0c\u7814\u7a76\u3057\u3066\u3044\u307e\u3059\u3002<\/p>\n\n\n\n<p>\u3000\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0\u6cd5\u306f\uff0c\u30bf\u30fc\u30b2\u30c3\u30c8 (\u8584\u819c\u6750\u6599) \u306b\u30a4\u30aa\u30f3\u5316\u3057\u305f\u30ac\u30b9\u3092\u885d\u7a81\u3055\u305b\u308b\u3053\u3068\u3067\uff0c\u30bf\u30fc\u30b2\u30c3\u30c8\u306e\u7c92\u5b50\u3092\u5f3e\u304d\u51fa\u3057\uff0c\u57fa\u6750 (\u6210\u819c\u3059\u308b\u5bfe\u8c61) \u306b\u4ed8\u7740\u30fb\u5806\u7a4d\u3055\u305b\uff0c\u6210\u819c\u3059\u308b\u6280\u8853\u3067\u3059\u3002\u3057\u304b\u3057\uff0c\u30b9\u30d1\u30c3\u30bf\u3055\u308c\u305f\u7c92\u5b50\u306e\u307b\u3068\u3093\u3069\u304c\u4e2d\u6027\u7c92\u5b50\u3067\u3042\u308b\u305f\u3081\uff0c\u57fa\u6750\u306b\u96fb\u5727\u3092\u5370\u52a0\u3057\u3066\u819c\u8cea\u3092\u5236\u5fa1\u3059\u308b\u3053\u3068\u304c\u56f0\u96e3\u3067\u3059\u3002<\/p>\n\n\n\n<p>\u3000HiPIMS\u3067\u306f\uff0c\u30bf\u30fc\u30b2\u30c3\u30c8\u88cf\u306b\u78c1\u77f3\u3092\u8a2d\u7f6e\u3059\u308b\u3053\u3068\u306b\u3088\u308a\uff0c\u96fb\u5834\u3068\u78c1\u5834\u306b\u3088\u308b\u30d7\u30e9\u30ba\u30de\u306e\u9589\u3058\u8fbc\u3081\u304c\u8d77\u3053\u308a\u307e\u3059\u3002\u307e\u305f\uff0c\u30d1\u30eb\u30b9\u96fb\u6e90\u3092\u7528\u3044\u3066\u5927\u96fb\u529b\u3092\u6295\u5165\u3059\u308b\u3053\u3068\u306b\u3088\u308a\uff0c\u30a4\u30aa\u30f3\u5316\u7387\u304c\u6539\u5584\u3055\u308c\uff0c\u819c\u8cea\u306e\u5411\u4e0a\uff0c\u69cb\u9020\u304c\u7dfb\u5bc6\u3067\u5747\u4e00\u306a\u6210\u819c\u304c\u53ef\u80fd\u3068\u306a\u308a\u307e\u3059\u3002<\/p>\n\n\n\n<p>\u3000\u672c\u7814\u7a76\u3067\u306f\uff0cHiPIMS\u306e\u6b20\u70b9\u306e\u6539\u5584\u3068\u30a4\u30aa\u30f3\u5316\u7387\u306e\u5411\u4e0a\u3092\u76ee\u6307\u3057\uff0c\u78c1\u5834\u5206\u5e03\u3092\u5909\u5316\u3055\u305b\u308b\u3053\u3068\u306b\u3088\u308b\u653e\u96fb\u9818\u57df\u306e\u5909\u5316\uff0c\u96fb\u6e90\u306e\u30a2\u30ec\u30f3\u30b8\u306b\u3088\u308b\u30a4\u30aa\u30f3\u5316\u7387\u306e\u5411\u4e0a\uff0c\u6210\u819c\u901f\u5ea6\u306e\u6539\u5584\uff0c\u3068\u3044\u3063\u305f\u3053\u3068\u3092\u884c\u3063\u3066\u304d\u307e\u3057\u305f\u3002\u307e\u305f\uff0cHiPIMS\u3068\u540c\u69d8\u306b\uff0c\u78c1\u77f3\u3068\u30d1\u30eb\u30b9\u30d1\u30ef\u30fc\u3092\u7528\u3044\u3066\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0\u306e\u52b9\u7387\u5316\u3092\u56f3\u3063\u305fHPPS (High Power Pulsed Sputtering) \u306e\u7814\u7a76\u3092\u884c\u3063\u3066\u3044\u307e\u3059\u3002<\/p>\n\n\n\n<p>\u3000\u7814\u7a76\u3092\u901a\u3057\u3066\uff0c\u78c1\u5834\u5206\u5e03\u3092\u5909\u5316\u3055\u305b\u308b\u3053\u3068\u3067\u30d7\u30e9\u30ba\u30de\u306e\u751f\u6210\u4f4d\u7f6e\u3068\u30ea\u30f3\u30b0\u5e45\u304c\u5909\u5316\u3059\u308b\u3053\u3068\u3092\u78ba\u8a8d\u3057\u307e\u3057\u305f\u3002\u96fb\u6e90\u306e\u30d1\u30eb\u30b9\u5e45\u3092\u4f4e\u6e1b\u3055\u305b\u308b\u3053\u3068\u3067\uff0c\u70ad\u7d20\u30bf\u30fc\u30b2\u30c3\u30c8\u306e\u30a4\u30aa\u30f3\u5316\u7387\u304c\u5411\u4e0a\u3059\u308b\u3053\u3068\u304c\u308f\u304b\u308a\u307e\u3057\u305f\u3002\u307e\u305f\uff0c\u30b9\u30d1\u30a4\u30ab\u30fb\u30b5\u30b9\u30c6\u30ca\u65b9\u5f0f\u3068\u3044\u3046\u9ad8\u96fb\u5727\u30fb\u77ed\u30d1\u30eb\u30b9\u5e45\u96fb\u6e90\u3068\uff0c\u4f4e\u96fb\u5727\u30fb\u9577\u30d1\u30eb\u30b9\u5e45\u96fb\u6e90\u306e2\u7a2e\u985e\u306e\u96fb\u6e90\u3092\u305d\u308c\u305e\u308c\u7528\u3044\u308b\u3053\u3068\u3067\uff0c\u30d7\u30e9\u30ba\u30de\u306e\u70b9\u706f\u6642\u9593\u304c\u5ef6\u9577\u3055\u308c\uff0c\u6210\u819c\u901f\u5ea6\u304c\u5411\u4e0a\u3059\u308b\u3053\u3068\u304c\u308f\u304b\u308a\u307e\u3057\u305f\u3002<\/p>\n\n\n\n<p>\u3000HPPS\u3067\u306f\uff0c\u78c1\u77f3\u306e\u914d\u7f6e\u3092\u5909\u5316\u3055\u305b\u308b\u3053\u3068\u306b\u3088\u308a\uff0cHiPIMS\u3088\u308a\u3082\u6210\u819c\u88c5\u7f6e\u3092\u5c0f\u578b\u306b\u3059\u308b\u3053\u3068\u304c\u51fa\u6765\uff0cHiPIMS\u306e\u6b20\u70b9\u3067\u3042\u3063\u305f\u88c5\u7f6e\u304c\u5927\u578b\u3067\u3042\u308b\u3068\u3044\u3046\u70b9\u3092\u6539\u5584\u3057\u3066\u3044\u307e\u3059\u3002<\/p>\n<\/div>\n\n\n\n<div class=\"wp-block-column\" style=\"flex-basis:33.33%\">\n<div class=\"wp-block-image\"><figure class=\"aligncenter size-medium\"><img loading=\"lazy\" width=\"300\" height=\"225\" src=\"https:\/\/pplab.eec.iwate-u.ac.jp\/wp-content\/uploads\/2020\/09\/hipms1-300x225.jpg\" alt=\"\" class=\"wp-image-237\" srcset=\"https:\/\/pplab.eec.iwate-u.ac.jp\/wp-content\/uploads\/2020\/09\/hipms1-300x225.jpg 300w, https:\/\/pplab.eec.iwate-u.ac.jp\/wp-content\/uploads\/2020\/09\/hipms1-80x60.jpg 80w, https:\/\/pplab.eec.iwate-u.ac.jp\/wp-content\/uploads\/2020\/09\/hipms1.jpg 640w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/figure><\/div>\n\n\n\n<p class=\"has-text-align-center\">HiPIMS\u306e\u30d7\u30e9\u30ba\u30de\u70b9\u706f\u5199\u771f<\/p>\n\n\n\n<div class=\"wp-block-image\"><figure class=\"aligncenter size-medium\"><img loading=\"lazy\" width=\"300\" height=\"272\" src=\"https:\/\/pplab.eec.iwate-u.ac.jp\/wp-content\/uploads\/2020\/09\/hipims2-300x272.jpg\" alt=\"\" class=\"wp-image-238\" srcset=\"https:\/\/pplab.eec.iwate-u.ac.jp\/wp-content\/uploads\/2020\/09\/hipims2-300x272.jpg 300w, https:\/\/pplab.eec.iwate-u.ac.jp\/wp-content\/uploads\/2020\/09\/hipims2-768x696.jpg 768w, https:\/\/pplab.eec.iwate-u.ac.jp\/wp-content\/uploads\/2020\/09\/hipims2-66x60.jpg 66w, https:\/\/pplab.eec.iwate-u.ac.jp\/wp-content\/uploads\/2020\/09\/hipims2.jpg 833w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/figure><\/div>\n\n\n\n<p class=\"has-text-align-center\">HPPS\u306e\u30d7\u30e9\u30ba\u30de\u70b9\u706f\u5199\u771f<\/p>\n<\/div>\n<\/div>\n\n\n\n<p><\/p>\n","protected":false},"excerpt":{"rendered":"<p>\u3000HiPIMS(High Power Impulse Magnetron Sputtering)\u306f\uff0c\u30d1\u30eb\u30b9\u30d1\u30ef &hellip; <\/p>\n","protected":false},"author":2,"featured_media":242,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":[],"categories":[1],"tags":[],"_links":{"self":[{"href":"https:\/\/pplab.eec.iwate-u.ac.jp\/index.php\/wp-json\/wp\/v2\/posts\/235"}],"collection":[{"href":"https:\/\/pplab.eec.iwate-u.ac.jp\/index.php\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/pplab.eec.iwate-u.ac.jp\/index.php\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/pplab.eec.iwate-u.ac.jp\/index.php\/wp-json\/wp\/v2\/users\/2"}],"replies":[{"embeddable":true,"href":"https:\/\/pplab.eec.iwate-u.ac.jp\/index.php\/wp-json\/wp\/v2\/comments?post=235"}],"version-history":[{"count":6,"href":"https:\/\/pplab.eec.iwate-u.ac.jp\/index.php\/wp-json\/wp\/v2\/posts\/235\/revisions"}],"predecessor-version":[{"id":253,"href":"https:\/\/pplab.eec.iwate-u.ac.jp\/index.php\/wp-json\/wp\/v2\/posts\/235\/revisions\/253"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/pplab.eec.iwate-u.ac.jp\/index.php\/wp-json\/wp\/v2\/media\/242"}],"wp:attachment":[{"href":"https:\/\/pplab.eec.iwate-u.ac.jp\/index.php\/wp-json\/wp\/v2\/media?parent=235"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/pplab.eec.iwate-u.ac.jp\/index.php\/wp-json\/wp\/v2\/categories?post=235"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/pplab.eec.iwate-u.ac.jp\/index.php\/wp-json\/wp\/v2\/tags?post=235"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}